@article{bibcite_11,
  author = {T. Banerjee and S.D. Funni and S. Roy and J.J. Cha and V. Fatemi},
  title = {Resist-free shadow deposition using silicon trenches for Josephson junctions in superconducting qubits},
  year = {2026},
  journal = {Nano Letters},
  doi = {10.1021/acs.nanolett.6c02734},
}